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Mechanism of the single-pulse ablative generation of laser induced periodic surface structures

机译:激光诱导单脉冲烧蚀的机理   周期性表面结构

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摘要

One of the remarkable capabilities of ultrashort polarized laser pulses isthe generation of laser-induced periodic surface structures (LIPSS). The originof this phenomenon is largely attributed to the interference of the incidentlaser wave and surface electromagnetic wave that creates a periodic absorptionpattern. Although, commonly, LIPSS are produced by repetitive irradiation ofthe same area by multiple laser pulses in the regime of surface melting andresolidification, recent reports demonstrate the formation of LIPSS in thesingle pulse irradiation regime at laser fluences well above the ablationthreshold. In this paper, we report results of a large-scale molecular dynamicssimulation aimed at providing insights into the mechanisms of single pulseablative LIPSS formation. The simulation performed for a Cr target reveals aninterplay of material removal and redistribution in the course of spatiallymodulated ablation, leading to the transient formation of an elongated liquidwall extending up to ~600 nm above the surface of the target at the locationsof the minima of the laser energy deposition. The upper part of the liquid walldisintegrates into droplets while the base of the wall solidifies on thetimescale of ~2 ns, producing a ~100 nm-long frozen surface feature extendingabove the level of the initial surface of the target. The properties of thesurface region of the target are modified by the presence of high densities ofdislocations and vacancies generated due to the rapid and highly nonequilibriumnature of the melting and resolidification processes. The insights into theLIPSS formation mechanisms may help in designing approaches for increasing theprocessing speed and improving the quality of the laser-patterned periodicsurface structures.
机译:超短偏振激光脉冲的显着功能之一是产生激光感应的周期性表面结构(LIPSS)。该现象的起因很大程度上归因于入射激光和表面电磁波的干扰,从而产生了周期性的吸收模式。尽管通常在表面熔化和再固化过程中通过多次激光脉冲对同一区域进行重复照射来产生LIPSS,但最近的报道表明,在单脉冲照射条件下,在远高于消融阈值的激光注量下会形成LIPSS。在本文中,我们报告了大规模分子动力学模拟的结果,旨在提供对单个脉冲烧蚀LIPSS形成机理的见解。对Cr靶进行的模拟揭示了在空间调制的烧蚀过程中材料去除和重新分布的相互作用,从而导致在激光的极小点处,在靶表面上方延伸直至〜600 nm的细长液壁的瞬态形成。能量沉积。液体壁的上部崩解成液滴,而壁的底部在约2 ns的时间尺度上凝固,产生了约100 nm长的冻结表面特征,延伸到靶标初始表面的水平上方。由于熔化和再凝固过程的快速和高度不平衡而产生的高密度的位错和空位的存在,改变了靶材表面区域的性质。对LIPSS形成机制的深入了解可能有助于设计方法,以提高处理速度并改善激光图案化的周期表面结构的质量。

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